Published Physics Experimental study and modeling of extreme ultraviolet 4000 lines/mm diffraction gratings coated with periodic and aperiodic Al/Mo/SiC multilayers Published on 10 January 2024 - Applied optics Authors: Amr Hisham K. Mahmoud, Sébastien de Rossi, Evgueni Meltchakov, Blandine Capitanio, Muriel Thomasset, Maxime Vallet, Franck Delmotte See the publication on HAL DOI Prev. Back to the list Next
